2013 International Technology Roadmap for Semiconductors (ITRS)

Executive Summary

Overview

Emerging Research Devices (summary)

Emerging Research Materials (summary)

Environment, Safety, and Health (summary)

Factory Integration (summary)

Front End Processes (summary)

Interconnect (summary)

Lithography (summary)

Metrology (summary)

Micro-Electro-Mechanical Systems (MEMS) (summary)

Modeling and Simulation (summary)

Process Integration, Devices, and Structures (PIDS) (summary)

Radio Frequency and Analog/Mixed-Signal Technologies (RFAMS) (summary)

System Drivers (summary)

Test and Test Equipment (summary)

Yield Enhancement (summary)