2015 International Technology Roadmap for Semiconductors (ITRS)

Executive Report

Section 1: System Integration

Section 2: Heterogeneous Integration

Section 3: Heterogeneous Components

Section 4: Outside System Connectivity

Section 5: More Moore

Section 6: Beyond CMOS

Section 7: Factory Integration

2015 ITRS ITWGs

1. Test
2. Lithography
3. Metrology
4. ERM
5. ESH
6. Yield Enhancement
7. Interconnect