2001 International Technology Roadmap for Semiconductors (ITRS)

Published on Tuesday, Aug 21, 2001, 3:32pm
by Semiconductor Industry Association

Executive Summary

Assembly and Packaging

Environment, Safety, and Health

Factory Integration

Front End Processes

Interconnect

Lithography

Modeling and Simulation

Process Integration, Devices, and Structures (PIDS)

System Drivers

Test and Test Equipment

Yield Enhancement