2011 International Technology Roadmap for Semiconductors (ITRS)

Executive Summary

Acknowledgments

Assembly and Packaging

Design

Emerging Research Devices

Emerging Research Materials

Environment, Safety, and Health

Factory Integration

Front End Processes

Interconnect

Lithography

Metrology

Micro-Electro-Mechanical Systems (MEMS)

Modeling and Simulation

Process Integration, Devices, and Structures (PIDS)

Radio Frequency and Analog/Mixed-Signal Technologies (RFAMS)

System Drivers

Test and Test Equipment

Yield Enhancement